MEMS Technology
Sensing for Mobile Devices
Ease of Integration
More about InvenSense >>
InvenSense
InvenSense is the world leader in motion sensing solutions for mobile devices and is dedicated to bringing solutions to market that have best-in-class performance, size and cost. The company's efforts have resulted in the introduction of the world's first integrated dual-axis gyroscope to target applications which include: image stabilization in digital cameras and camera phones; gesture-based applications to navigate content using 3D mice and television remotes; user interface navigation and gaming for mobile handsets; and dead reckoning and location-based services for portable navigation devices (PNDs) and mobile phones.
InvenSense's pioneering innovations in MEMS motion sensor design and fabrication, based on its patented Nasiri-Fabrication, has culminated in the world's first integrated dual-axis gyroscope which overcomes the major challenges for adoption into handheld consumer products. With the smallest footprint, lowest cost and highest functionality of any other rate sensor in the market, InvenSense's IDG family of gyro sensors are designed for ease of integration as the central motion sensing component for a variety of products with millions of units already shipped.
Founded in 2003 by Steven Nasiri, a pioneer in the MEMS sensor industry, InvenSense is a venture-backed company located in Sunnyvale, California. Major investors in InvenSense include Artiman Ventures, Partech International and Qualcomm.
InvenSense Products
|
Part
|
Sensitivity (mV/°/sec)
|
Full Scale Range(°/sec)
|
Package Size (mm)
|
AutoZero Temp Sensor
|
4.5x 2nd Gain Stage
|
Applications
|
|
2
|
500
|
6x6x1.4
|
|
|
General Motion Sensing Applications
|
|
|
2
|
500
|
4x5x1.2
|
Yes
|
Yes
|
||
|
0.5
|
2000
|
4x5x1.2
|
Yes
|
Yes
|
||
|
43
|
23
|
4x5x1.2
|
Yes
|
|
Image Stabilization
|
|
|
4
|
50
|
6x6x1.4
|
|
|
Navigation
|
|
|
15
|
67
|
4x5x1.2
|
Yes
|
|
Integrated Dual-Axis Gyroscope
The IDG-300 MEMS gyroscope is an integrated dual-axis angular rate sensor designed for consumer and industrial applications requiring low cost, small size and high performance. The IDG-300 gyro leverages InvenSense's patented gyro, MEMS and wafer-scale integration technologies to deliver unprecedented cost, size, functionality and manufacturing advantages.
The IDG-300 gyro includes all the integrated electronics required for complete application-ready functionality. Factory trimmed scale factors eliminate the need for external active components and end-user calibration. The IDG-300 gyro is lead-free and Green Compliant.
Applications
- Inertial Measurement Units (IMUs)
- Handheld GPS Navigation Devices
- Radio controlled helicopters
- Toys and game devices
- Robotic and power tools
- Antenna positioning
- Remote control
Features
- Integrated X- and Y-axis gyro on a single chip
- Factory set full scale range of ±500°/sec
- Low offset voltage
- Integrated low-pass filters
- Integrated reset switches for high-pass filters
- Superior vibration rejection over a wide frequency range
- High cross-axis isolation by design
- 3V single supply operation
- 5000 g shock tolerance
- RoHS Compliant (Completely Lead Free)
Benefits
- Single chip dual-axis gyro sensor
- Small footprint
- Low cost dual-axis gyro solution
- Integrated electronics for complete application functionality
- Inherent performance improvements:
- High temperature & humidity resistance
- Superior shock & vibration tolerances
- Low cross-axis sensitivity
- Compatible with standard SMT processes
IDG-300 Datasheet (310k)
| Parameters | Typical Specifications | Units |
|---|---|---|
| Full Scale Range | 500 | °/sec |
| Sensitivity | 2.0 | mV/(°/sec) |
| Reference Voltage | 1.23 | V |
| Zero Rate Output | 1.5 | V |
| Nonlinearity | <1 | % FS |
| Cross Axis Sensitivity | ±2 | % |
| Power Supply | 3.3 | V |
| Power Consumption | 9.5 | mA |
| Startup Time | 200 | ms |
| Specified Temp Range | 0 to +70 | °C |
| Weight | 0.14 | g |
| Parameters | Absolute Maximum Ratings | Units |
| Power Supply Voltage | -0.3 to +6.0V | V |
| Shock (any axis, unpowered) | 5000 | g for 0.3ms |
| Storage Temp Range | -40 to +125 | °C |
The IDG-500 MEMs gyroscope is an integrated dual-axis angular rate sensor designed specifically for complex motion sensing 3D input devices and gaming controllers.
The IDG-500 gyrscope utilizes state-of-the-art MEMS fabrication with wafer-scale integration technology. This technology combines MEMS wafers and CMOS wafers together using a patented and proprietary wafer-scale bonding process that simultaneously provides electrical connections and hermetically sealed bonding.
This unique and novel fabrication is the key enabling technology that allows for the design and manufacture of high performance, multi-axis, integrated MEMS gyroscopes in a very small and economical package. Integration at the wafet level minimizes parasitic capacitances allowing for improved signal-to-noise versus a discrete solution. With the addition of the new patented Auto Zero feature for minimizing bias drift over temperature, the IDG-500 offers unparalleled gyrsocope performance for 3D input and gaming applications.
APPLICATION
- High performance motion sensing game controllers
- Pointing devices, multimedia remotes, & computer mice
FEATURES
- Integrated X- and Y- axis gyros on a single chip
- Factory set full scale range of ±500°/sec
- 4x5x1.2mm QFN package
- Integrated low-pass filter
- Auto Zero function
- Temperature sensor
- 4.5x second gain stage amplifier
- High vibration rejection over wide frequency range
- High cross-axis isolation for design
- 10,000 g shock tolerance
- 3V single supply operation
- ROHS and Green Compliant
BENEFITS
- World's smallest dual-axis gyro sensor
- Highest dynamic range to measure fast-action motion
- Integrated electronics for complete signal conditioning
- Lowest cross-axis sensitivity for best signal accuracy
- Hermeticity for high temperature & humidity resistance
- Most robust design for high impact consumer electronics
- Compatible with standard SMT assembly processes
|
Parameters |
Typical Specifications |
Units |
|
Full Scale Range |
±500 |
°/sec |
|
Sensitivity |
2.0 |
mV/(°/sec) |
|
Zero Rate Output |
1.35 |
V |
|
Nonlinearity |
<1.0 |
% FS |
|
Cross Axis Sensitivity |
±1.0 |
% |
|
Power Supply |
3.0 ± 10% |
V |
|
Power Consumption |
7.0 |
mA |
|
Startup Time |
50 |
ms |
|
Shock (any axis, unpowered) |
10,000 |
g for 0.3ms |
|
Specified Temp Range |
-20 to +85 |
°C |
The IDG-650 gyroscope is the world's first integrated dual-axis angular rate sensor designed for high performance game controllers and remote controls requiring wide dynamic range motion sensing, high impact shock resistance, small size and low cost. It uses InvenSense's proprietary and patented MEMS technology with vertically driven, vibrating masses to make a functionally complete, low-cost, dual-axis angular rate sensor. All required electronics are integrated onto a single chip with the sensor.
The IDG-650 gyro uses two sensor elements with novel vibrating dual-mass bulk silicon configurations that sense the rate of rotation about the X- and Y-axis (in-plane sensing). This results in a unique, integrated dual-axis gyro with guaranteed-by-design vibration rejection and high cross-axis isolation.
The IDG-650 gyro includes integrated electronics necessary for application-ready
functionality. Factory trimmed scale factors eliminate the need for external active
components and end-user calibration. This product is lead-free and Green Compliant.
APPLICATIONS
- High performance motion sensing game controllers
- Pointing devices, multimedia remotes, & computer mice
FEATURES
- Integrated X- and Y-axis gyro on a single chip
- Factory set full-scale range ±2000°/sec
- Low bias drift over temperature
- 4x5x1.2mm QFN package
- Auto Zero function
- Temperature sensor
- Integrated amplifiers & low-pass filters
- 4.5x second gain stage amplifier
- Highest cross-axis isolation by design
- Superior vibration rejection over a wide frequency range
- 10,000 g shock tolerance
- 3V single supply operation
- RoHS Compliant (Completely Lead Free)
BENEFITS
- World's smallest dual-axis gyro sensor
- Highest dynamic range to measure fast-action motion
- Integrated electronics for complete signal conditioning
- Lowest cross-axis sensitivity for best signal accuracy
- Hermeticity for high temperature & humidity resistance
- Most robust design for high impact consumer electronics
- Compatible with standard SMT assembly processes
|
Parameters |
Typical Specifications |
Units |
|
Full Scale Range |
±2000 |
°/sec |
|
Sensitivity |
0.5 |
mV/°/sec |
|
Zero Rate Output |
1.35 |
V |
|
Nonlinearity |
<1 |
% FS |
|
Cross Axis Sensitivity |
±1 |
% |
|
Power Supply Voltage |
3.0 ±10% |
V |
|
Power Consumption |
7 |
mA |
|
Startup Time |
50 |
ms |
|
Shock (any axis, unpowered) |
10,000 |
g for 0.3ms |
|
Specified Temp Range |
-20 to +85 |
°C |
Integrated Dual-Axis Gyroscope
The IDG-1004 is an integrated dual-axis angular rate sensor (gyroscope). It uses InvenSense's proprietary and patented MEMS technology with vertically driven, vibrating masses to make a functionally complete, low-cost, dual-axis angular rate sensor. All required electronics are integrated onto a single chip with the sensor. The IDG-1004 gyro includes integrated electronics necessary for application-ready functionality. It incorporates X- and Y-axis low-pass filters and an EEPROM for on-chip factory calibration of the sensor. Factory trimmed scale factors eliminate the need for external active components and end-user calibration. This product is lead-free and Green Compliant. Applications
Features
Benefits
IDG1004 Datasheet (310k)
| Parameters | Typical Specifications | Units |
|---|---|---|
| Full Scale Range | 50 | °/sec |
| Sensitivity | 4.0 | mV/(°/sec) |
| Reference Voltage | 1.23 | V |
| Zero Rate Output | 1.5 | V |
| Nonlinearity | <1 | % FS |
| Cross Axis Sensitivity | ±2 | % |
| Power Supply | 3.3 | V |
| Power Consumption | 9.5 | mA |
| Startup Time | 400 | ms |
| Specified Temp Range | -5 to +75 | °C |
| Weight | 0.14 | g |
| Parameters | Absolute Maximum Ratings | Units |
| Power Supply Voltage | -0.3 to +6.0V | V |
| Shock (any axis, unpowered) | 10000 | g for 0.3ms |
| Storage Temp Range | -40 to +105 | °C |
The IDG-1123 MEMS gyroscope utilizes state-of-the-art MEMS fabrication with wafer-scale integration techology. This technology combines completed MEMS wafers and completed CMOS electronic wafers together using a patented and proprietary wafer-scale bonding process that simultaneously provides electrical connections and hermetically sealed enclosures.
This unique and novel fabrication is the key enabling technology that allows for the design and manufacture of high performance, multi-axis, integrated MEMS gyroscopes in a very small and economical package. Integration at the wafer-level minimizes parasitic capacitance, allowing for improved signal-to-noise versus a discrete solution. It also enables the incorporation of a rich feature set which minimizes the need for external components.
Applications
- Image stabilization systems for camcorders/cameras
- Image stabilization systems for camera phones
Features
- Integrated X- and Y-axis gyros on a single chip
- Factory set full-scale range of ±43°/sec
- Integrated low-pass filters
- User defined high-pass filters
- Integrated reset switches for high-pass filters
- High vibration rejection over wide frequency range
- High cross-axis isolation by design
- 10,000 g shock tolerance
- 3V single supply operation
- RoHS Compliant (Completely Lead Free)
Benefits
- Single chip dual-axis gyro sensor
- Small footprint
- Low cost dual-axis gyro solution
- Integrated electronics for complete application functionality
- Inherent performance improvements:
- High temperature & humidity resistance
- Superior shock & vibration tolerances
- Low cross-axis sensitivity
- Compatible with standard SMT processes
Request Information
|
Parameters |
Typical Specifications |
Units |
|
Full Scale Range |
±43 |
°/sec |
|
Sensitivity |
23 |
mV/(°/sec) |
|
Zero Rate Output |
1.23 |
V |
|
Nonlinearity |
<1 |
% FS |
|
Cross Axis Sensitivity |
±1 |
% |
|
Power Supply |
3.0±10% |
V |
|
Power Consumption |
7.0 |
mA |
|
Startup Time |
130 |
ms |
|
Shock (any axis, unpowered) |
10,000 |
g for 0.3ms |
|
Specified Temp Range |
-20 to +80 |
°C |
The IDG-1215 MEMS gyroscope is an integrated dual-axis angular rate sensor designed for consumer and industrial applications requiring low cost, small size and high performance. The IDG-1215 gyro leverages InvenSense's patented gyro, MEMS and wafer-scale integration technologies to deliver unprecedented cost, size, functionality and manufacturing advantages.
The IDG-1215 gyro includes all the integrated electronics required for complete application-ready functionality. Factory trimmed scale factors eliminate the need for external active components and end-user calibration. The IDG-1215 gyro is lead-free and Green Compliant.
Applications
- Inertial Measurement Units (IMUs)
- Handheld GPS Navigation Devices
- Radio controlled helicopters
- Toys and game devices
- Robotic and power tools
- Antenna positioning
- Remote control
Features
- Integrated X- and Y-axis gyros on a single chip
- Factory set full scale range of ±67°/sec
- Low offset voltage
- 4x5x1.2mm QFN package
- Auto Zero function
- Temperature sensor
- Integrated amplifiers & low-pass filters
- 4.5x second gain stage amplifier
- High cross-axis isolation by design
- 10,000 g shock tolerance
- 3V single supply operation
- RoHS Compliant (Completely Lead Free)
Benefits
- Single chip dual-axis gyro sensor
- Small footprint
- Low cost dual-axis gyro solution
- Integrated electronics for complete application functionality
- Inherent performance improvements:
- High temperature & humidity resistance
- Superior shock & vibration tolerances
- Low cross-axis sensitivity
- Compatible with standard SMT processes
|
Parameters |
Typical Specifications |
Units |
|
Full Scale Range |
±67 |
°/sec |
|
Sensitivity |
15 |
mV/(°/sec) |
|
Zero Rate Output |
1.35 |
V |
|
Nonlinearity |
<1 |
% FS |
|
Cross Axis Sensitivity |
±1 |
% |
|
Power Supply |
3.0±10% |
V |
|
Power Consumption |
7.0 |
mA |
|
Startup Time |
50 |
ms |
|
Shock (any axis, unpowered) |
10,000 |
g for 0.3ms |
|
Specified Temp Range |
-20 to +85 |
°C |